Large Chamber SEM

  View to the large chamber SEM Copyright: © A. Herwartz


Anke Aretz © Copyright: GFE


Anke Aretz

Group leader AFM and Large Chamber SEM


+49 241 80 24346



The large chamber SEM: large chamber for dynamic experiments.

Areas of application:

  • Non-destructive examination of large objects with scanning electron microscopy (SEM) and microanalysis (EDX).
  • Cyclic examination of components before and after different operating stages
  • Variable pressure examination option
  • In-situ testing with dedicated test equipment:
    • Bending test with optional heating option up to 800°C
    • Heating module for a temperature range up to 1500°C
    • in-situ machining device with the possibility to observe deformation of sheared surface and chip formation

You can find more information in our flyers:

Flyer-Use of the Large Chamber SEM

Flyer-Insitu devices LCSEM


You can find an interactive 360 degree view here