Used Techniques
 
 
Service
 
ERC
 

SEM - Scanning Electron Microscopy

Contact: Dr. rer. nat. Alexander Schwedt
e-mail: schwedt@gfe.rwth-aachen.de
phone: +49-241-80-24347


Scanning Electron Microscopy (SEM) is a well suited tool for the examination of surfaces and structures on a micrometer or submicrometer scale. The achievable lateral resolution is about 1 nm. SEM micrographs show an extreme large depth of focus.

Integrated energy-dispersive x-ray microanalysers (EDX) allow chemical analysis of microscopic volumes for all elements with atomic number Z > 4 at a detection limit of > 0.1 weight%. The analysis of electron backscatter diffraction patterns (EBSD) provides information on crystal structures and -orientations. It can be used to describe the microstructure, determine the phase contents, grain size distributions, analyze deformation mechanisms or textures within the material.


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