Scanning Electron Microscopy (Contact: Dr. Alexander Schwedt):
Scanning electron microscope
JEOL JSM-7000F(2006) with field emission cathode.
Lateral resolution 1.2 nm at 30 kV, 3.0 nm at 1 kV. Combined EDX/EBSD-System EDAX Pegasus
for chemical and crystallographic analysis.
Scanning electron microscope
ZEISS DSM 962
(1994) with W-cathode. Lateral resolution 2.5 nm at 30 kV. EDX-System Oxford Link ISIS
with HPGe-Detector and UT-Window. Chemical analysis of microscopic volumes for all elements
with atomic number > 4
Scanning electron microscope
ZEISS DSM 982 Gemini
(1995) with field emission cathode. Lateral resolution 1.0 nm at 30 kV; 4.0 nm at 1 kV.
EDX-System Oxford Link ISIS with HPGe-Detector and UT-Window

SEM Jeol JSM-7000F
Large Chamber Scanning Electron Microscopy (Contact: Dr. Anke Aretz):
Scanning electron microscope
MIRA VP

SEM MIRA VP
(Flyer)
Microprobe and Surface Analysis (Contact: Dr. Silvia Richter)
Electron probe microanalyzer
CAMEBAX SX 50 (Baujahr 1991)
- Four wavelength dispersive x-ray spectrometers
- Multilayer crystals for the detection of soft x-rays
.

CAMEBAX SX 50
Field emission electron probe microanalyzer
JEOL JXA-8530F (Installed in 2012)
- Five wavelength dispersive x-ray spectrometers
- Multilayer crystals for the detection of soft x-rays
- Spectrometers for high intensity measurements and fast mappings
- Two EDS systems with SDD technology (JEOL and Bruker)
- Spatial resolution of 3 nm at 30 kV, 40 nm at 10 kV 10 nA and 100 nm at 10 kV 100 nA
- Advanced equipment for light element analysis

JEOL JXA-8530F
Transmission Electron Microscopy (Contact: Priv.-Doz. Dr. Thomas Weirich)
FEI Tecnai F20
Analytical transmission electron microscope
JEOL JEM 2000 FX II
(1989) with EDS normal SiLi-detector (Tracor TN 5502), PEELS (Gatan 666), Slow-Scan CCD-Camera (Gatan 690), Heating stage (JEM EM-SHH4; <800° C), Point resolution = 0.28 nm,
Tilting angles: ±25° (X and Y)
High resolution transmission electron microscope
JEOL JEM 2000 EX II
(1989) with TEM-Dips (Tietz), Point resolution = 0.21 nm, Tilting angles: ±12° (X and Y)

FEI Tecnai F20
Scanning Probe Microscopy (Contact: Dr. Anke Aretz)
Atomic force microscope
SIS, NanoStation II
(2007) Contact-, Non-Contact-, Magnetic Force and Lithographic Mode, possibility to measure under liquids.

SIS, NanoStation II
Atomic force microscope
PARK Autoprobe CP
(1995) with Hysitron-Nanoindenter.

Park Autoprobe CP

TriboScope Hysitron Inc.
Focused Ion Beam Applications (Contact: M. Sc. Daesung Park)
FEI STRATA FIB 205

FEI STRATA FIB 205
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