Scanning Electron Microscopy (Contact: Dr. Alexander Schwedt):

Scanning electron microscope JEOL JSM-7000F(2006) with field emission cathode.
Lateral resolution 1.2 nm at 30 kV, 3.0 nm at 1 kV. Combined EDX/EBSD-System EDAX Pegasus
for chemical and crystallographic analysis.

Scanning electron microscope ZEISS DSM 962
(1994) with W-cathode. Lateral resolution 2.5 nm at 30 kV. EDX-System Oxford Link ISIS
with HPGe-Detector and UT-Window. Chemical analysis of microscopic volumes for all elements
with atomic number > 4

Scanning electron microscope ZEISS DSM 982 Gemini
(1995) with field emission cathode. Lateral resolution 1.0 nm at 30 kV; 4.0 nm at 1 kV.
EDX-System Oxford Link ISIS with HPGe-Detector and UT-Window


SEM Jeol JSM-7000F

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Large Chamber Scanning Electron Microscopy (Contact: Dr. Anke Aretz):

Scanning electron microscope MIRA VP


SEM MIRA VP (Flyer)

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Microprobe and Surface Analysis (Contact: Dr. Silvia Richter)

Electron probe microanalyzer CAMEBAX SX 50 (Baujahr 1991)

- Four wavelength dispersive x-ray spectrometers
- Multilayer crystals for the detection of soft x-rays .


CAMEBAX SX 50


Field emission electron probe microanalyzer JEOL JXA-8530F (Installed in 2012)

- Five wavelength dispersive x-ray spectrometers
- Multilayer crystals for the detection of soft x-rays
- Spectrometers for high intensity measurements and fast mappings
- Two EDS systems with SDD technology (JEOL and Bruker)
- Spatial resolution of 3 nm at 30 kV, 40 nm at 10 kV 10 nA and 100 nm at 10 kV 100 nA
- Advanced equipment for light element analysis


JEOL JXA-8530F

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Transmission Electron Microscopy (Contact: Priv.-Doz. Dr. Thomas Weirich)

FEI Tecnai F20

Analytical transmission electron microscope JEOL JEM 2000 FX II
(1989) with EDS normal SiLi-detector (Tracor TN 5502), PEELS (Gatan 666), Slow-Scan CCD-Camera (Gatan 690), Heating stage (JEM EM-SHH4; <800° C), Point resolution = 0.28 nm,
Tilting angles: ±25° (X and Y)

High resolution transmission electron microscope JEOL JEM 2000 EX II
(1989) with TEM-Dips (Tietz), Point resolution = 0.21 nm, Tilting angles: ±12° (X and Y)

FEI Tecnai F20

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Scanning Probe Microscopy (Contact: Dr. Anke Aretz)

Atomic force microscope SIS, NanoStation II
(2007) Contact-, Non-Contact-, Magnetic Force and Lithographic Mode, possibility to measure under liquids.

SIS, NanoStation II

Atomic force microscope PARK Autoprobe CP
(1995) with Hysitron-Nanoindenter.

Park Autoprobe CP
TriboScope Hysitron Inc.

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Focused Ion Beam Applications (Contact: M. Sc. Daesung Park)

FEI STRATA FIB 205


FEI STRATA FIB 205



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