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EPMA - Electron Probe Microanalysis

Contact: Dr. rer. nat. Silvia Richter
e-mail: richter@gfe.rwth-aachen.de
phone: +49-241-80-24348


The Electron Probe Micro Analyser (EPMA) is a combination of a scanning electron microscope (SEM) with several wavelength dispersive x-ray spectrometers (WDS). EPMA is a dedicated tool for the sensitive chemical analysis of microscopic volumes in a large variety of solid materials. The spatial resolution ranges around 1 µm. Surfaces or cross sections can be investigated. The WDS-technique is able to detect elements from Beryllium up to Uranium with mass contents > 20 ppm. The composition of the material is determined on a microscopic scale with relative accuracy of 1 - 3 %. The technique is highly sensitive to the detection of light elements Be, B, C, N, O, F. A computer and microprocessor control of the instrument sample stage enables automatic data acquisition, line scanning and area scanning.


Applications

Bulk material:

Thin films, thin coatings: